High power magnetron sputtering techniques have become essential tools in the deposition of advanced thin films. By utilising high power pulses, these methods generate highly ionised plasmas that ...
Trikon Technologies and Eco-Snow Systems have developed a sputtering technique for producing GaAs and other compound semiconductor devices The process has the potential to increase productivity for ...
THE cathodic sputtering process has been almost completely replaced in recent years by the vacuum evaporation technique for the production of thin solid films. However, renewed interest in the ...
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