IEEE is the world’s largest technical professional organization. It has over 427,000 members across 190 countries who are engineers, scientists and allied professionals. The organization produces over ...

With semiconductor feature sizes continuing to shrink, the variability arising from process technologies such as strained silicon, as well as the manufacturing processes themselves at 45 nm and below, ...

As DRAM technologies scale to increasingly tighter pitches, the patterning requirements exceed the limits of conventional single-exposure DUV lithography. In advanced nodes such as D1b (1-beta), ...