The 22 award recipients represent an exciting range of stellar achievements across light-based sciences and ...

M. K. Sears, J. Bekaert, B. W. Smith, "Pupil wavefront manipulation for optical nanolithography", Proc. SPIE 8326, (2012) paper M. K. Sears, G. Fenger, J. Mailfert, B ...

IBM develops an optical lithography technique capable of producing structures less than 32 nm in size which its says gives the industry seven years of breathing space. Scientists at IBM say they have ...

Nanoimprint lithography (NIL) is re-emerging amid an explosion of new applications in the market. Canon, EV Group, Nanonex, Suss and others continue to develop and ship NIL systems for a range of ...

Several vendors are rolling out next-generation inspection systems and software that locates problematic defects in chips caused by processes in extreme ultraviolet (EUV) lithography. Each defect ...

Micronic Laser Systems AB and ASML Holding NV will form a joint venture focusing on the optical maskless lithography market, the two European companies announced today. The companies originally ...

(Nanowerk Spotlight) Optical metasurfaces are sub-wavelength nanopatterned layers that interact strongly with light, thus dramatically altering the light properties over a sub-wavelength thickness.

Building an integrated circuit (IC) requires various physical and chemical processes to be performed on a semiconductor (e.g., silicon) substrate. Millions of transistors can be fabricated and wired ...

IBM announced last month that it had fabricated the smallest high-quality line patterns ever created by optical lithography. Jacqueline Hewett spoke to the researchers involved to find out how they ...

Lithography, based on conventional ink-printing processes, is a technique for patterning a variety of layers, such as conductors, semiconductors, or dielectrics, on a surface. Nanopatterning stretches ...