ACM Research, a two-year-old Californian company, says it can see the end of the road for chemical mechanical polishing (CMP), and is looking to move in on the market with a non-contact process. It ...
SAN JOSE — KLA-Tencor Corp. here rolled out what the company says is the industry's first production-worthy, in-situ film thickness and end-point control system for copper metal polishing in chemical ...
SANTA CLARA, Calif.--(BUSINESS WIRE)--June 25, 2003--Applied Materials, Inc. (Nasdaq:AMAT) announces Reflexion(R) LK, the industry's only low down force, high throughput CMP (chemical mechanical ...
You are able to gift 5 more articles this month. Anyone can access the link you share with no account required. Learn more. FAIRFIELD— Fairfield police are investigating the theft of about $3,000 ...
An error has occurred. Please try again. With a Centralmaine.com subscription, you can gift 5 articles each month. It looks like you do not have any active ...
Electromigration and resistivity present serious obstacles to interconnect scaling, as previously discussed. In a copper damascene process, grain growth is constrained by the narrow trenches into ...
Some results have been hidden because they may be inaccessible to you
Show inaccessible results
Feedback