To find the weak link of the structural stiffness is important to improve machine tool stiffness. However, how to overcome the static deformation with difficulty acquisition is a difficult problem in ...

A new low-damage imaging technique developed at the Japan Advanced Institute of Science and Technology (JAIST) is opening the door to detailed analysis of fragile nanomaterials for the first time.

Electron-beam inspection is proving to be indispensable for finding critical defects at sub-5nm dimensions. The challenge now is how to speed up the process to make it economically palatable to fabs.