Scanning electron microscopes are great tools for 2D inspection and metrology of a wide variety of samples. However, their 3D capabilities are still very limited, especially when it comes to ...

Stylus-based surface profiling is a standard technique for accurate, repeatable surface shape, topography and step height measurement in applications ranging from semiconductor R&D to solar cell QC.

This article explains the benefits of the non-contact inspection method used by 3D optical profilers, and outlines the best practices and measurement results for some specialized PTB ...

The performance, reliability and longevity of machined parts often depend on the physical characteristics of their functional surfaces. However, legacy surface roughness parameters, such as R a, are ...